| Contributors |
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xiii | (2) |
| Preface |
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xv | |
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1 An Introduction to the Design of Clean and Containment Areas |
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1 | (20) |
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1 | (1) |
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The History of Cleanrooms |
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1 | (5) |
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6 | (12) |
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6 | (1) |
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Classification of Cleanrooms |
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7 | (1) |
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Class of Rooms Required by Different Industries |
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8 | (1) |
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9 | (9) |
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Containment of Contamination |
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18 | (1) |
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Containment Rooms and Cabinets |
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18 | (1) |
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Supply of Liquid and Gases to Cleanrooms |
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19 | (1) |
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20 | (1) |
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Bibliography of the History of Cleanrooms |
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20 | (1) |
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2 International Standards for the Design of Cleanrooms |
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21 | (30) |
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21 | (1) |
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21 | (3) |
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The Naming of Standards, Practices and Technical Orders |
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21 | (1) |
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Who Produces Cleanroom Standards? |
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22 | (1) |
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International Development of Cleanroom Standards |
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22 | (2) |
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Cleanroom Standards--Influencing Standards |
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24 | (3) |
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Contaminants and Other Factors to be Considered |
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24 | (1) |
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Cleanlines--Particulate Contaminants |
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24 | (1) |
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Relationship Between Class and Design Materials |
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25 | (1) |
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Cleanrooms and Classified Rooms |
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25 | (1) |
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Class Conditions to be Considered When Designing to a Certain Class |
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26 | (1) |
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27 | (9) |
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The Present Engineering Classes |
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27 | (6) |
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The New ISO Classification Standard |
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33 | (3) |
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The Biocontamination and Pharmaceutical Classes |
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36 | (4) |
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Production of Sterile Pharmaceuticals |
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36 | (3) |
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Other Biocontamination Class Standards |
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39 | (1) |
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40 | (1) |
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Other Standards for the Cleanroom |
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41 | (4) |
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Cleanroom Design Standards |
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41 | (2) |
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Isolator and Minienvironment Design |
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43 | (1) |
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Recommended Practices (RPs) of the Institute of Environmental Sciences and Technology (IEST), USA |
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44 | (1) |
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Standards for Surface Cleanliness |
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44 | (1) |
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Cleanroom Standards for Design Purposes, to Select Technical Concepts and Solutions, Materials, Equipment, etc. |
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45 | (1) |
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45 | (2) |
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Abbreviations/Source Code |
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47 | (2) |
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49 | (2) |
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3 The Design of Cleanrooms for the Microelectronics Industry |
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51 | (28) |
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51 | (1) |
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Manufacturing Semiconductor Circuits |
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52 | (4) |
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52 | (1) |
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53 | (2) |
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55 | (1) |
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56 | (2) |
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58 | (20) |
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58 | (8) |
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66 | (1) |
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67 | (1) |
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Airborne Molecular Contamination |
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67 | (1) |
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68 | (1) |
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Recirculation Air Moving System |
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68 | (2) |
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70 | (1) |
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70 | (2) |
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72 | (1) |
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72 | (1) |
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73 | (1) |
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74 | (1) |
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Monitoring Control and Alarm System |
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74 | (2) |
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76 | (2) |
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78 | (1) |
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78 | (1) |
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78 | (1) |
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4 The Design of Cleanrooms for the Pharmaceutical Industry |
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79 | (36) |
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79 | (1) |
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Types of Pharmaceutical Processes |
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80 | (2) |
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80 | (1) |
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81 | (1) |
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81 | (1) |
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82 | (3) |
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82 | (1) |
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Use of Guides and Standards |
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82 | (1) |
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83 | (1) |
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83 | (2) |
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Environmental Cleanliness |
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85 | (24) |
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Contamination Generation and Release |
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86 | (1) |
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Ingress Through Defective HEPA Filter Systems |
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86 | (1) |
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Contamination Removal in a Room by Displacement or Dilution Ventilation |
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87 | (3) |
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Isolator and Barrier Devices |
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90 | (14) |
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Room Pressurization and Air Movement Control |
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104 | (5) |
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Temperature and Humidity Control |
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109 | (1) |
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109 | (1) |
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109 | (1) |
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110 | (1) |
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Construction, Services and Equipment |
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110 | (1) |
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Commissioning and Performance Qualification |
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111 | (1) |
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111 | (1) |
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Operational Qualification |
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111 | (1) |
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112 | (1) |
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113 | (2) |
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5 The Design of Cleanrooms for the Medical Device Industry |
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115 | (8) |
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115 | (1) |
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The Case for Contamination Control |
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116 | (1) |
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Quality System Philosophy |
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116 | (1) |
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Air Cleanliness Requirements |
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116 | (2) |
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118 | (3) |
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118 | (1) |
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118 | (3) |
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121 | (1) |
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121 | (1) |
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121 | (2) |
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6 Contamination Control Facilities for the Biotechnology Industry |
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123 | (18) |
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123 | (1) |
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Biotechnology--The Industry |
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124 | (1) |
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124 | (6) |
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124 | (1) |
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125 | (1) |
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Recovery and Purification |
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126 | (2) |
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128 | (1) |
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129 | (1) |
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130 | (6) |
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Biocontainment Legislation |
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130 | (2) |
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132 | (1) |
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133 | (2) |
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Decontamination of Liquid Wastes |
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135 | (1) |
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Biopharmaceutical Manufacturing Facilities |
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136 | (3) |
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Integration of Biocontainment and Product Isolation |
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137 | (1) |
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138 | (1) |
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138 | (1) |
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139 | (2) |
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7 Cost-Efficiency and Energy-Saving Concepts for Cleanrooms |
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141 | (16) |
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141 | (1) |
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Minimizing the Air Flow Rate for Optimum Cost-Efficiency |
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141 | (1) |
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Cleanroom Systems: Custom-Made Protection Schemes |
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142 | (7) |
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143 | (1) |
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144 | (2) |
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Area Protection in Extensive Cleanrooms |
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146 | (2) |
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148 | (1) |
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Optimization of Energy Consumption in Cleanroom Systems |
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149 | (1) |
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Example of a Fully Integrated Energy Concept |
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150 | (1) |
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Some Semi-Quantitative Cost Indications |
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151 | (3) |
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The Cost Impact of Minienvironments and Isolators |
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153 | (1) |
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154 | (1) |
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154 | (1) |
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155 | (2) |
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8 High Efficiency Air Filtration |
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157 | (26) |
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157 | (1) |
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The Construction of High Efficiency Filters |
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158 | (1) |
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159 | (2) |
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161 | (1) |
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Particle Removal Mechanisms |
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161 | (4) |
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The High Efficiency Filter as Straightener |
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165 | (1) |
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The Testing of High Efficiency Filters |
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165 | (11) |
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United States Military-Standard 282 (Mil-Std 282) |
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165 | (2) |
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Sodium Flame Test (Eurovent 4/4 and British Standard 3928) |
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167 | (1) |
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Institute of Environmental Sciences and Technology (IEST) Recommended Practice `Testing ULPA Filters' |
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168 | (1) |
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European Standard (EN 1822) |
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169 | (1) |
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Probe (Scan) Testing of High Efficiency Filters |
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170 | (4) |
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Institute of Environmental Sciences and Technology (IEST) Recommended Practice `HEPA and ULPA Filters' |
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174 | (1) |
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Two-Flow Efficiency Testing and Encapsulation |
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174 | (2) |
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Filter Housings for High Efficiency Filters |
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176 | (3) |
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Admissible Air Leakage Seal |
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177 | (1) |
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177 | (2) |
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In-service Tests for High Efficiency Filters |
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179 | (2) |
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181 | (1) |
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182 | (1) |
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9 Construction Materials and Surface Finishes for Cleanrooms |
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183 | (20) |
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183 | (1) |
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183 | (1) |
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Performance Criteria of Construction Materials and Surfaces |
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184 | (3) |
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185 | (1) |
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186 | (1) |
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186 | (1) |
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186 | (1) |
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Considerations for Specific Components |
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187 | (1) |
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Examples of Materials and Features of Construction |
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187 | (1) |
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Cleanroom Components for Good Surface Cleanliness and Low Deterioration |
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188 | (12) |
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188 | (1) |
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189 | (7) |
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196 | (1) |
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196 | (4) |
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Possible Cleanroom Materials and Constructions |
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200 | (1) |
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Measures to be Taken During the Construction and Assembly of Construction |
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200 | (2) |
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202 | (1) |
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10 Purification Techniques for Clean Water |
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203 | (28) |
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203 | (2) |
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Removal of Dissolved Ions |
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205 | (15) |
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206 | (3) |
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209 | (6) |
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215 | (5) |
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220 | (3) |
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220 | (2) |
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The Electro-deionization or Continuous Deionization Process |
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222 | (1) |
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223 | (2) |
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223 | (1) |
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Reverse Osmosis and Nanofiltration |
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224 | (1) |
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224 | (1) |
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224 | (1) |
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Removal of Particulate Matter |
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225 | (1) |
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Filtration Using Sand and Other Particulate Media |
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225 | (1) |
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Cartridge and Microfiltration |
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225 | (1) |
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226 | (1) |
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226 | (3) |
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227 | (1) |
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Ultraviolet (UV) Irradiation |
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227 | (1) |
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228 | (1) |
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228 | (1) |
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229 | (2) |
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11 The Design of an Ultra-Pure Water System for Use in the Manufacture of Integrated Circuits |
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231 | (20) |
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231 | (1) |
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Impact of Contaminated Water |
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231 | (3) |
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232 | (1) |
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233 | (1) |
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233 | (1) |
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233 | (1) |
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234 | (1) |
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234 | (17) |
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234 | (1) |
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235 | (1) |
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235 | (1) |
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235 | (1) |
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236 | (1) |
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237 | (1) |
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237 | (1) |
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238 | (3) |
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Deaeration/Degassification |
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241 | (1) |
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241 | (3) |
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244 | (1) |
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245 | (1) |
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246 | (1) |
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Organic Reduction Using UV Radiation |
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247 | (1) |
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247 | (1) |
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248 | (2) |
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250 | (1) |
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12 The Production and Transmission of High Purity Gases for the Semiconductor Industry |
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251 | (18) |
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251 | (1) |
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251 | (1) |
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251 | (1) |
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252 | (1) |
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252 | (1) |
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252 | (1) |
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252 | (1) |
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Production and Transport of Nitrogen |
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253 | (6) |
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253 | (1) |
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254 | (1) |
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254 | (1) |
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254 | (3) |
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257 | (2) |
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Production and Transport of Oxygen |
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259 | (1) |
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259 | (1) |
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Production and Transport of Argon |
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260 | (2) |
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260 | (2) |
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Production and Transport of Hydrogen |
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262 | (2) |
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262 | (2) |
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264 | (3) |
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264 | (3) |
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267 | (2) |
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13 Materials for Services Pipework |
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269 | (26) |
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269 | (1) |
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Metallic Pipeline Materials |
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269 | (7) |
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269 | (1) |
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270 | (1) |
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271 | (5) |
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276 | (1) |
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Polymeric Pipeline Materials |
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276 | (7) |
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276 | (2) |
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Some Polymeric Pipe Materials |
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278 | (5) |
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Some Aspects of Pipework Design Using Polymers |
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283 | (4) |
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Thermal Expansion Effects |
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284 | (1) |
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Strength/Stiffness Effects |
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284 | (1) |
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Fibre-Reinforced Polymers |
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285 | (1) |
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Some Other Design Aspects |
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286 | (1) |
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286 | (1) |
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287 | (1) |
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288 | (4) |
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288 | (1) |
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Water Passing Through the Various Stages of Purification |
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289 | (1) |
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290 | (1) |
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291 | (1) |
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Microelectronics Industries |
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291 | (1) |
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292 | (1) |
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292 | (1) |
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292 | (3) |
| Index |
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